AlN surface modification by UV laser radiation

  1. Yaghdjian, L.
  2. Nicolas, G.
  3. Vacquier, G.
  4. Autric, M.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

Year of publication: 1997

Volume: 3404

Pages: 215-223

Type: Conference paper

DOI: 10.1117/12.308619 GOOGLE SCHOLAR